【摘要】 理论分析了980nm高功率垂直腔面发射激光器(VCSEL)的器件特性与其分布布拉格反射镜(DBR)反射率的依赖关系,并计算了具有不同有源区直径的VCSEL的输出特性.分析了具有不同有源区直径的VCSEL在不同DBR反射率条件下的连续输出特性曲线,发现DBR反射率的改变会对有源区直径不同的VCSEL产生不同程度的影响.为了验证理论分析的结果,进行了器件测试实验.实验结果表明,有源区直径为500μm的VCSEL,当其N-DBR反射率分别为99.7%及99.2%时,在连续注入电流为6A时,其输出功率分别为2.01W和2.09W;而有源区直径为200μm的VCSEL,当N-DBR反射率为99.7%及99.2%时,连续注入电流为3A时,其输出功率分别为0.64W及1.12W.器件测试结果有效验证了理论分析的结论.更多还原

【Abstract】 The dependency of the characteristics of 980nm high power vertical-cavity surface-emitting Lasers(VCSELs) on the distributed Bragg reflector(DBR) reflectivity was analyzed theoretically.The output characteristics of the VCSELs with different active region diameters were calculated.The output characteristics at different DBR reflectivities were analyzed.It is found that the variation of DBR reflectivity exerts different influences on the VCSELs with different diameters of active region.The test experiment was carried out in order to validate the theoretical analysis.The experimental results show that the output powers of VCSELs with 500-μm-diameter active region under the injected current of 6A are 2.01W and 2.09W when the N-DBR reflectivities are 99.7% and 99.2%,respectively.However,the output powers of VCSELs with 200-μm-diameter active region under the injected current of 3A are 0.64W and 1.12W when the N-DBR reflectivities are 99.7% and 99.2%,respectively.It was concluded that the theoretical results are validated by the experiment effectively.更多还原