【摘要】 介绍了电容式高分子湿敏元件的基本结构及制造工艺。分析了湿敏元件在恶劣环境下的失效机理及产生的原因,指出了感湿膜中的颗粒状缺陷是造成湿敏元件在恶劣环境下失效的主要原因。提出了在湿敏元件制作、上电极工艺制造技术和湿敏元件筛选检验的改进措施。更多还原

【Abstract】 The basic structure and manufacturing process of the capacitive polymer humidity sensor are introduced.Analysis of the humidity sensor failure mechanism and causes in harsh environments are proposed.This paper points out that the main reason of humidity sensor failure in harsh environment is the granular defects in wet induced membrane.It also puts forward improvements on production,the top electrode manufacturing technology and screening test of humidity sensor.更多还原