【摘要】 研制了一套由压电陶瓷驱动器、压力传感器、环状力施加机构和控制电路组成的反射镜动态热变形补偿系统用于补偿激光反射镜热变形球差。圆形反射镜在两个同轴不同半径的环形力作用下,其内环区域产生曲率可变的抛物面形变,由此补偿反射镜热变形带来的球差项。对镜体进行了有限元数值计算,建立了变形量与沉积热量与受力的关系。采用口径为100mm,厚度为8mm平面反射镜进行了受力-变形以及辐照-受力-变形实验,利用干涉仪对面型进行监测。研究表明,在不同推力作用下,有效区域内变形始终保持抛物面形。给出了推力-面型变化曲线,在225N推力下,中心最大变形超过3μm。在不同热沉积量下,镜体中心位移和受力保持线性关系,力-变形系数为0.013μm/N。更多还原

【Abstract】 A compensation system composed of a PZT,a pressure sensor,an annular force mechanism and a control circuit is developed to compensate the sphere error brought by thermal deformation of a laser mirror.Under the effect of two coaxial annular forces with different radii,the circular mirror produces parabolic deformation in the inner region,which can compensate the sphere error brought by the thermal deformation of the mirror.The finite element method is used to analyze the mirror and the relation among the center displacement with energy absorbance and the force is derived.The experiments of force-deformation and energy absorbance-force-deformation are conducted for a flat mirror with the diameter of 100 mm and the thickness of 8 mm,in which a interferometer is used to monitor the surface deformation.Obtained results show that under different forces,the deformation of effective region always maintains a parabolic shape.Furthermore,the force-deformation curve is obtained,which shows that the centre displacement is over 3 μm under 225 N.Under different energy absorbances,the central displacement of the mirror varies with the force in linearity and the coefficient of force-centre displacement is 0.013 μm/N.更多还原