【摘要】 在蓝宝石基的氮化镓衬底上采用射频磁控溅射结合剥离的方法制作了NiFe-SiOx磁性金属颗粒膜,利用PECVD淀积绝缘层,制备出"SiN绝缘层/NiFe-SiOx薄膜/SiN绝缘层/金属线圈"结构的平面电感。测试表明,对于单圈电感,与无磁膜结构相对比在1 GHz时电感量有30%的提升,且对Q值影响不大;对于多圈电感,电感量与电感结构密切相关,当磁膜同时存在于线圈下和线圈之间时对电感量提升最大,但截止频率较低;而磁膜在电感线圈正下方的结构对电感量提升较前一种磁膜电感低,但截止频率较前一种磁膜电感高。更多还原

【Abstract】 The planar inductors with the NiFe-SiOx magnetic granular film were fabricated.The inductors have a simple structure of the "SiN insulating layer/magnetic film(NiFe-SiOx)/SiN insulating layer/metal coils",in which the planar single-turn and multi-turn metal coils and the NiFe-SiOx magnetic granular film fabricated by the RF magnetron sputtering method and the insulating layers deposided by the PECVD were used.The fabrication process is compatible with a MMIC integrated process.The inductors without the magnetic films were fabricated as a referential sample using the same process.Our measurements show that for the single-turn inductor,there are about 30% enhancement of the inductance at 1 GHz when the magnetic film were present and the quality factor remains almost the same in both structures.The multi-turn inductors,with the magnetic films filled under and between the coils enhance the inductance most significantly,but this kind of inductor has lower cut-off frequency.The inductors with magnetic films just below the metal coils have lower increase of the inductance than the inductor with the magnetic films filled under and between the coils,but it has lager cut-off frequency.更多还原