【摘要】 为了研究pn结对微机械p/n多晶Si热电堆性能的影响,设计了两种结构的热电堆器件,采取不同的退火条件,对其结构进行了研究。实验结果表明,工艺过程中形成的pn结会使得热电堆的电阻变大,信号变小,退火条件决定了热电堆器件能否正常工作。因此,在设计热电堆时应该尽量避免pn结,可以采用p-Si/n-Si分离结构予以解决。更多还原

【Abstract】 In order to reduce the size of thermopiles and improve the duty cycle of the devices,the close-arranged thermocouples are usually used to form the thermopile.As the impurities in multi-crystal Si can be horizontal proliferation during annealing,pn junction will form at the junctions of the p and n type materials to impact the thermopiles performance.To research the effect of pn junction on the performance of p/n polysilicon thermopiles,two kinds of structures of thermopile devices are designed,and different annealing conditions are adopted to study them.Experimental results show that the formation of pn junction in the process can make thermopile resistance become larger,the infrared response signal become smaller,and the annealing conditions determine the thermopiles work properly.Thus,in the design of thermopiles,pn junction should be avoided,and the separated structure can solve this problem.更多还原