【摘要】 利用直流磁控溅射沉积钛膜,以硫酸为电解液进行不同时间的阳极氧化,获得多孔阳极氧化钛(PATO)薄膜.用X射线衍射仪、扫描子显微镜、原子力显微镜分别表征PATO薄膜的结构和形貌特征,用分光光度计测量样品的反射光谱.结果表明,制得的氧化钛薄膜是多晶的Ti10O18;样品的表面有明显的孔洞结构,且粗糙度随着氧化时间的增加而增大.随着氧化时间从10min增加到40,60,90,120min,样品的颜色相应地由蓝色逐渐过渡到黄色、橙色、紫红色和淡紫色.氧化时间为120min的PATO薄膜的在可见光区的折射率低于2.0,孔隙率约为0.32;粗糙的表面及薄膜内部的孔洞增强了光的散射,导致其消光系数大于0.1.更多还原

【Abstract】 Porous titanium oxide films,with the anodizing time ranging from 10 to 120 min,were prepared by anodization of Ti films in sulphuric acid electrolyte.Ti films were deposited on glass substrates by direct current magnetron sputtering.The microstructure and morphology of porous anodic titanium oxide (PATO) films were investigated by X-ray diffraction,field-emission scanning electron microscopy and atomic force microscopy.Reflectance of the sample was measured by spectrophotometer.The experimental results indicated that PATO film is a polycrystalline Ti10O18.The holes on PATO film surface can be observed obviously.The surface roughness increases with increasing the anodizing time.It is found that the color of the sample changes from blue to yellow,orange,violet-red and orchid when the anodizing time increases from 10 to 40,60,90 and 120 min.Refractive indices of PATO film with anodizing 120 min are lower than 2.0 in visible spectral region,and porosity is about 0.32.Rough surface and voids in PATO film enhance the optical scattering,which induce the extinction coefficient is more than 0.1.更多还原