【摘要】 用CH4,H2和NH3为反应气体,利用等离子体增强热丝化学气相沉积在沉积有碳膜的Si衬底上制备了a-C:N:H纳米尖端,并用扫描电子显微镜和微区Raman光谱仪对碳膜和纳米尖端进行了表征。结果表明:Raman谱中含有与碳和氮相关的峰,且纳米尖端的Raman谱比碳膜的Raman谱有很强的荧光背景。Raman谱中的峰说明沉积的碳膜和纳米尖端是a-C:N:H薄膜和a-C:N:H尖端。a-C:N:H纳米尖端的Raman谱中强荧光背景的产生表明其在激发光源照射的过程中发射了强荧光,对a-C:N:H纳米尖端产生强荧光的机理进行了探讨。更多还原

【Abstract】 a-C:N:H nanotips were fabricated on the Si substrate deposited with carbon film by plasmaenhanced chemical vapor deposition using methane,hydrogen and ammonia as the reaction gases.The carbon film and the nanotips were characterized by scanning electron microscopy and micro-Raman spectroscopy and the results indicated that the Raman spectra have the peaks related to carbon and nitrogen and the photoluminescence background in the Raman spectrum of the carbon nanotips is stronger than that of the carbon film.The peaks in the Raman spectra illustrates that the deposited carbon film and the nanotips are a-C:N:H film and a-C:N:H nanotips,respectively.The strong photoluminescence background in the Raman spectrum of the a-C:N:H nanotips indicates that the a-C:N:H nanotips produce the strong photoluminescence when the a-C:N:H nanotips are irradiated by the excitation of 514.5 nm Ar laser.The mechanism which the a-C:N:H nanotips produce strong photoluminescence was analyzed.更多还原