【摘要】 依据电容式微型加速度计的结构及工作原理,对高膛压火炮膛内弹载高过载硅微加速度计进行了动态响应研究,建立了加速度计弹性元件的力学模型及动态响应数学模型.通过计算给出了弹性元件在高过载条件下的固有频率及动态响应曲线.结果表明,微型加速度计的动态响应与弹性元件的固有频率密切相关,该微型加速度计具有良好的动态响应特性.更多还原

【Abstract】 According to the structure and working principle of capacitive micro electronic mechanical systems(MEMS) accelerometer,the dynamic response analysis of a high-g MEMS accelerometer used for ballistic testing of high-pressure gun was presented.The mechanical model and mathematical model of the accelerometer’s elastic element were built.Inherent frequency and dynamic response curves of the elastic element were obtained by numerical calculation.The results show that the dynamic response of MEMS accelerometer closely relates to natural frequency of elastic element,and the MEMS accelerometer possesses preferable dynamic response character.更多还原