【摘要】 采用Ir–Ta氧化物涂层阳极(DSA)和直流电解法研究了酸性蚀刻液的阳极氧化再生回用过程。酸性蚀刻液在Ir–Ta氧化物涂层阳极的氧化再生过程中发生浓差极化,电极反应速率为Cu+离子扩散传质所控制,极限电流密度与Cu+离子浓度和温度成正比,采用小于或等于极限电流密度的电流密度进行阳极氧化时不析出氯气。酸性蚀刻液阳极氧化再生的电流密度小,槽电压低,电解能耗少,电流效率可达到100%。阳极氧化再生后酸性蚀刻液的蚀刻能力与双氧水再生的相近,完全可以替代双氧水再生。更多还原

【Abstract】 The process of anodic oxidation for regeneration and recycling of acidic etching solution was studied by direct-current electrolysis with an Ir–Ta oxide-coated anode (DSA). Concentration polarization occurs in the oxidation regeneration process of acidic etching solution at Ir–Ta oxide-coated anode. The electrode reaction rate is related to the diffusion of Cu+ ions. The limiting current density is proportional to the Cu+ concentration and temperature. At a current density lower than or equal to the limiting current density,chlorine gas is not evolved during the anodic oxidation regeneration. The anodic oxidation regeneration has the features of low current density,low cell voltage,little electrolysis energy consumption and current efficiency 100%. The acidic etching solution regenerated by anodic oxidation has an etching capacity similar to that regenerated by using hydrogen peroxide solution. Hence,anodic oxidation can substitute the use of hydrogen peroxide solution.更多还原