【摘要】 粘附现象是微/纳机构中特有的现象,在构件材料强度满足要求的条件下,微/纳机构中的粘附和摩擦是造成其失效的主要原因。如何防止或减轻粘附已成为微/纳机电系统(MEMS/NEMS)领域的研究热点。介绍了微/纳机构中的粘附问题,分析了粘附机理和各种粘附接触模型,说明了表面能法和微凸体积分法防粘附设计微/纳机构的原理,最后阐述了释放干燥工艺、减少实际接触面积和降低表面能等各种抗粘附措施。更多还原

【Abstract】 Adhesion is a peculiar phenomenon of micro/nano-machine.When the strength of the component’s material meets the demand,the adhesion and friction in the micro/nano-machines are the main cause of their failure.To overcome or reduce adhesion has become the hotspot in the micro/nano-electromechanical systems(MEMS/NEMS) research field.The adhesion issue in the micro/nano-machines is introduced.The mechanisms of adhesion and various adhensive models used in adhesive contact are analyzed.The micro/nano-machines’ design principle of anti-adhesion using surface energy method and asperity integral method is illustrated.Various anti-adhesion methods such as release dry processes,real contact area reducing,and surface energy reducing,are presented.更多还原