【摘要】 提出了一种基于TiN双谐振梁结构的MEMS谐振式压力传感器,利用TiN谐振梁的谐振频率与被测压力的关系进行压力测量。针对传感器的敏感结构建立了数学模型,通过理论分析和ANSYS有限元软件的模拟,得出了谐振梁长度的变化范围和谐振梁的结构参数,并确定了TiN谐振梁在矩形压力膜上方的最佳位置。这对传感器的结构设计具有重要的指导意义。更多还原

【Abstract】 A structure of TiN double resonant beams pressure sensor is proposed,the pressure is measured through the relation between the resonant frequency of TiN resonant beams and the measured pressure.The maths model of sensitive structures of the resonant sensor is established,through the analysis and numeration from the theory,and simulation by the ANSYS software,the varied extension of the length and the optimization of the beams are educed and the optimal position of the TiN resonant on the rectangle pressure membrane is confirmed.And this is very important to the design of the sensors’ structure.更多还原