【摘要】 首先采用射频溅射在单晶硅(Si)上制备氧化锌(ZnO)薄膜,作为生长ZnO纳米棒的晶种层,再在水热条件下生长ZnO纳米棒。X射线衍射、X射线能量色散谱,扫描电镜及室温光致发光谱对样品的物相结构、成分、表面微观形貌和晶体缺陷进行了表征。结果表明合成的ZnO纳米棒是六方纤锌矿结构,长径比较高,结晶良好。研究了ZnO纳米棒/单晶Si传感器在空气和酒精气体中的电压-电流(I-V)特性,阻抗谱及响应-恢复时间。该传感器在+6V的偏置电压下,其电阻在0.08g/L酒精气体中下降71%,响应时间小于1min,可以作为一种新型的酒精气体传感器。更多还原

【Abstract】 The ZnO thin films were prepared on single crystal silicon by the radio-frequency sputtering,and ZnO nano-rods were prepared on the ZnO films by hydrothermal method.The crystal structure,surface morphology,composition and crystal defects of the products were characterized by X-ray diffraction(XRD),scanning electron microscopy(SEM),energy dispersive analysis of X-ray(EDAX)and photoluminescence(PL).It shows that ZnO nano-rods belong to the hexagonal wurtzite structure,have higher length-diameter and better crystallization.The paper studied the I-V characteristics,impedance and response-recovery time of ZnO nano-rods /single crystal Si sensor in air and alcohol gas.The resistance of ZnO nano-rods /single crystal Si sensor decreases by 71% in 0.08 g/L ethanol gas at +6 V bias voltage,and response time is less than 1 min.It can serve as a new type of alcohol gas sensor with high sensing property.更多还原