【摘要】 DLC薄膜的拉曼光谱表征主要依靠D峰和G峰的强度比值(ID/IG)来定性判断sp3含量,但当sp3所占百分比高于20%时,ID/IG值对sp3含量的变化不敏感,判断的误差很大。采用直流磁控溅射和多弧离子镀制备了一系列无氢DLC薄膜样品,并测量了样品的拉曼光谱和维氏硬度。通过数据分析,发现薄膜硬度和拉曼光谱中的G峰半峰宽具有很好的相关性,因而提出通过G峰半峰宽来定量判断DLC薄膜中sp3含量的拉曼光谱表征新方法。更多还原

【Abstract】 The ratio between intensities of the D peak and the G peak(ID/IG) is used to estimate sp3 content of the DLC films.However,this method has limitations.When sp3 content exceeds 20%,ID/IG has very low correlations with the content of sp3,therefore,estimation of sp3 content using this method could lead to significant error.DC-magnetron sputtering and multiple-arc ion plating are used to deposit a series of hydrogen-free diamond-like carbon samples.Raman spectra and Vickers hardness of samples were measured and analyzed.A strong correlation between the hardness and G-peak’s full width at half maximum(FWHM) was discovered.The results show that it’s feasible to measure the content of sp3 by using the G-peak’s FWHM in Raman spectra.更多还原