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A novel closed-form resistance model for trapezoidal interconnects

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【作者】 陈宝君唐祯安余铁军

【Author】 Chen Baojun Tang Zhen’an Yu Tiejun (1 School of Electronic Science and Technology,Dalian University of Technology,Dalian 116023,China) (2 School of Electronics and Information Engineering,Dalian Jiaotong University,Dalian 116028,China) (3 Department of R&D,Sigrity Inc,USA)

【机构】 School of Electronic Science and Technology,Dalian University of TechnologySchool of Electronics and Information Engineering,Dalian Jiaotong UniversityDepartment of R&D,Sigrity Inc,USA

【摘要】 <正>A closed-form model for the frequency-dependent per-unit-length resistance of trapezoidal cross-sectional interconnects is presented.The frequency-dependent per-unit-length resistance R(f) of a trapezoidal interconnect line is first obtained by a numerical method.Using the method we quantify the trapezoid edge effect on the resistance of the interconnect and the current density distribution in the cross section.Based on this strict numerical result,a novel closed-form model R(f) for a single trapezoidal interconnect is fitted out using the Levenberg-Marquardt method. This R(f) can be widely used for analyzing on-chip interconnects when the frequency is changing.The model is computationally very efficient with respect to the numerical method,and the results are found to be accurate.

【Abstract】 A closed-form model for the frequency-dependent per-unit-length resistance of trapezoidal cross-sectional interconnects is presented.The frequency-dependent per-unit-length resistance R(f) of a trapezoidal interconnect line is first obtained by a numerical method.Using the method we quantify the trapezoid edge effect on the resistance of the interconnect and the current density distribution in the cross section.Based on this strict numerical result,a novel closed-form model R(f) for a single trapezoidal interconnect is fitted out using the Levenberg-Marquardt method. This R(f) can be widely used for analyzing on-chip interconnects when the frequency is changing.The model is computationally very efficient with respect to the numerical method,and the results are found to be accurate.

【基金】 Project supported by the National Natural Science Foundation of China(No.90607003).
  • 【文献出处】 半导体学报 ,Journal of Semiconductors , 编辑部邮箱 ,2010年08期
  • 【分类号】TN402
  • 【被引频次】1
  • 【下载频次】50
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