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Raman scattering of polycrystalline GaSb thin films grown by the co-evaporation process

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【作者】 乔在祥孙云何炜瑜刘玮何青李长健

【Author】 Qiao Zai-Xiang,Sun Yun,He Wei-Yu Liu Wei,He Qing,and Li Chang-Jian The Tianjin Key Laboratory for Photoelectronics Thin Film Devices and Technology, Nankai University,Tianjin 300071,China

【机构】 The Tianjin Key Laboratory for Photoelectronics Thin Film Devices and Technology,Nankai University

【摘要】 <正>This paper reports that GaSb thin films have been co-deposited on soda-lime glass substrates.The GaSb thin film structural properties are characterized by Raman spectroscopy.The Sb-A1g/GaSb-TO ratio decreases rapidly with the increase of substrate temperature,which suggests a small amount of crystalline Sb in the GaSb thin film and suggests that Sb atoms in the thin film decrease.In Raman spectra,the transverse optical(TO) mode intensity is stronger than that of the longitudinal optical(LO) mode,which indicates that all the samples are disordered.The LO/TO intensity ratio increases with increasing substrate temperature which suggests the improved polycrystalline quality of the GaSb thin film.A downshift of the TO and LO frequencies of the polycrystalline GaSb thin film to single crystalline bulk GaSb Raman spectra is also observed.The uniaxial stress in GaSb thin film is calculated and the value is around 1.0 GPa.The uniaxial stress decreases with increasing substrate temperature.These results suggest that a higher substrate temperature is beneficial in relaxing the stress in GaSb thin film.

【Abstract】 This paper reports that GaSb thin films have been co-deposited on soda-lime glass substrates.The GaSb thin film structural properties are characterized by Raman spectroscopy.The Sb-A1g/GaSb-TO ratio decreases rapidly with the increase of substrate temperature,which suggests a small amount of crystalline Sb in the GaSb thin film and suggests that Sb atoms in the thin film decrease.In Raman spectra,the transverse optical(TO) mode intensity is stronger than that of the longitudinal optical(LO) mode,which indicates that all the samples are disordered.The LO/TO intensity ratio increases with increasing substrate temperature which suggests the improved polycrystalline quality of the GaSb thin film.A downshift of the TO and LO frequencies of the polycrystalline GaSb thin film to single crystalline bulk GaSb Raman spectra is also observed.The uniaxial stress in GaSb thin film is calculated and the value is around 1.0 GPa.The uniaxial stress decreases with increasing substrate temperature.These results suggest that a higher substrate temperature is beneficial in relaxing the stress in GaSb thin film.

【关键词】 GaSbco-evaporationRamanstress
【Key words】 GaSbco-evaporationRamanstress
【基金】 supported by the National 863 Program of China(Grant No 2004AA513020)
  • 【文献出处】 Chinese Physics B ,中国物理B , 编辑部邮箱 ,2009年05期
  • 【分类号】TB383.2
  • 【被引频次】2
  • 【下载频次】11
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