【摘要】 介绍了一种新型的体硅微机械工艺制造的框架式陀螺及其工艺改进。框架式设计使得陀螺的驱动模态和检测模态解耦;静电力驱动外框使得陀螺进入初始谐振模态;通过内部质量块和固定电极组成的差分敏感电容对的电容极板交叠面积的变化来检测输入的角速度信号;变面积的检测方法消除了变间距检测电容变化的非线性。陀螺的驱动模态和检测运动模态都在平面内运动,因此工作阻尼以滑模阻尼为主,从而使得器件在常压下也具有较高的品质因子。深反应离子刻蚀获得了大的可动质量块,也使得弹性梁在Y方向和Z方向上有较大的弹性系数,从而降低交叉耦合并获得了较高的吸合电压。改进后的工艺过程降低了深反应离子刻蚀过程中的根部效应对器件的损伤,并同时使得质量块质量增加了50%。对原型器件的驱动和检测特性以及功能结果进行了测试,并给出了测试结果。更多还原

【Abstract】 This paper presented a new bulk micromachined frame gyroscope with decoupled driving and sensing modes and the improvement of its process flow.The outer frame was driven into primary oscillation by electrostatic force,while the inner proof mass senses rate signal by varying overlapped area of electrodes,which eliminated the nonlinear instinct by varying gap.Damping factors for both driving and sensing modes were low,because the driving motion and sensing motion both moved in-plane.This also resulted in high quality factors at atmosphere.A large proof mass can be made by DRIE,which also ensured that large dimensions of spring beams were made to lower coupling and increased pull-in voltage.Damages to gyroscope devices caused by the footing effect during deep reactive ion etching(DRIE) were reduced by the improved process flow,which also increased the proof mass by 50%.Driving and sensing characteristics of a prototype have been tested and functional behavior of the gyroscope has been tested as well and the results are given.更多还原