【摘要】 用于光刻加工的磁悬浮平面电机的6个运动自由度之间存在着紧密的电磁和力学耦合。为实现各运动自由度的解耦控制,提出了直线电机型电磁执行器的电流控制模型、基于模式力的解耦动力学模型和平面电机解耦控制策略。模式力使各自由度的动力学模型不再存在耦合,且都为简单的2阶线性系统。设计了样机的X位置伺服控制器,仿真结果表明该控制器使解耦后的X位置控制达到了预期的动、静态性能,并具有良好的抗扰性和鲁棒性。更多还原

【Abstract】 There is tight electromagnetic and mechanical coupling among 6-degree of freedom (DOF) motions of magnetic levitation planar motor for photolithography. For decoupling control of the 6-DOF motions, this paper presents the current-controlled model of linear motors as the electromagnetic actuators, the decoupled kinetics model based on the modal forces, and the decoupling control strategy of the planar motor. The 6-DOF kinetics models are successfully decoupled by the modal forces and become simple 2nd order linear systems. The X position servo controller of the prototype is designed. The simulation results show that the controller proposed makes the decoupled X position control with the disired performaces and the control system has good immunity and robust stability.更多还原