【摘要】 研制了用于X射线测量的化学气相沉积(CVD)金刚石薄膜探测器。该探测器灵敏区直径为15 mm、厚度300μm,其暗电流在800 V偏压下小于50 pA,且暗电流-电压曲线线性较好。就CVD金刚石探测器对不同能量X射线的响应及脉冲X射线时间响应进行了理论和实验研究。结果表明:该探测器对6~22 keV X射线具有10-4~10-2A.W-1的灵敏度,假设电荷收集效率为39%时,灵敏度的理论值与实验测量值符合较好,探测器的RC时间常数约为1.5 ns;对亚纳秒脉冲X射线的响应上升时间为2~3 ns。更多还原

【Abstract】 A chemical vapor deposition(CVD) diamond film detector with the diameter of 15 mm and thickness of 300 μm was fabricated for the X-ray beam detection.The dark current of the detector is lower than 50 pA under the biased voltage of 800 V.The sensitivity and time response of the detector were investigated by both experiment and theoretic calculation.The experimental sensitivity is between 10-4-10-2 A·W-1 for 6-22 keV X-ray,which is in good agreement with the theoretic results when the charge collection efficiency is assumed to be 39%.Resistance-capacity time constant is 1.5 ns.The pulse response rising time for sub-nanosecond pulse X-ray is 2-3 ns.更多还原