【摘要】 本文在直径为0.8mm硬质合金钻头上进行沉积金刚石涂层的研究。在沉积之前,先用硝酸和铁氰化钾进行腐蚀处理,以去除表面的Co。用微波等离子体CVD设备进行金刚石的沉积。在金刚石涂层沉积过程中,钻头尖端在微波电磁场中产生辉光放电现象,导致钻头尖端刃部很难获得金刚石涂层。通过使用金属丝屏蔽的方法改变钻头周围的微波电磁场分布,成功的采用微波等离子体CVD法在钻头上沉积出了金刚石涂层。用扫描电子显微镜(SEM),能量色散谱仪(EDS)和激光拉曼光谱(Raman)对钻头的表面形貌和金刚石薄膜的质量进行了表征,同时在铝基复合材料上进行了钻孔测试。结果表明金刚石薄膜表面比较光滑,晶粒尺寸较小,涂层质量良好,薄膜的附着力也较高。更多还原

【Abstract】 Preliminary experimental results are given on diamond coatings deposited on the cemented carbide drills with a diameter of 0.8mm in this paper. Prior to the deposition, in order to remove Co, the drills were etched by HNO3 and K3[Fe(CN)6]. A microwave plasma chemical vapor deposition (MWPCVD) device was used for the experiment. During the diamond deposition, a concentrated glow discharge was observed appearing around the tips of the drills, and diamond coatings could hardly be deposited on there. A metal wire shielding method was used to avoid the glow discharge concentration, so the diamond coated drills were prepared successfully . The surface morphology and quality of diamond coatings were examined by scanning electron microscopy (SEM), energy disperse spectroscopy (EDS) and raman spectroscopy (Raman). The cutting performance of the diamond-coated drill was studied by drilling SiC particle reinforced aluminum matrix composite. The results showed that the high quality diamond -coated drills have smooth roughness, small grain size and good adhesive strength.更多还原