【摘要】 以压阻检测技术为基础并结合硅微MEMS加工技术设计了一种二维加速度计微结构,期望利用该新型的结构提高加速度计的灵敏度,实现二维方向的加速度检测。该加速度计采用四个相互垂直的悬臂梁支撑中间有刚硬柱体的结构,通过利用合理布置的压敏电阻构成的惠斯通电桥测量水平面内两个方向的加速度。建立了该结构的数学模型并用有限元分析软件ANSYS对敏感弹性元件进行分析。最后对加工出的加速度计进行了相关的测试。测试结果表明:该加速度计水平面内两个方向的灵敏度高、线形度较好,X向灵敏度为0.7552mv/g,线性度为0.99967,Y向灵敏度为0.6833mv/g,线性度为0.99966。更多还原

【Abstract】 A novel of Two-Axis accelerometer is presented in this paper,which is based on piezoresistive detection and fabricated on a single-crystalline-silicon using MEMS technology.It is desirable that the application of ingenious structure of the accelerometer may improve the sensitivity.The sensor consists of four vertical cantilever beams with attached cylinder in the center of the structure.By locating the resistor logically formed the Wheatstone birdge,this sensor can measure the acceleration in two-direction.The calibration method and finite element method(FEM) for the accelerometer are proposed.The test results are presented at last.The experiment results show that both the two direction of the accelerometer have high sensitivity and good linearity.The sensitivity of the X direction is 0.755 2 mv/g and Y is 0.683 3 mv/g,the linearity of the X direction is 0.999 67 and Y is 0.999 66.更多还原