【摘要】 针对超精密定位系统对定位精度的要求,研究智能PID控制技术,以提高系统的定位精度。研究对象是采用宏/微双伺服驱动系统中由压电陶瓷器件+柔性铰链构成的两维超精密定位系统。由于压电陶瓷器件+柔性铰链构成的微动系统具有迟滞、蠕变等强非线性,同时受到宏动系统高加速运行的扰动,常规PID控制难以获得良好控制效果。对此,提出神经网络自适应模糊推理PID位置控制系统,并进行了控制系统结构研究,实验结果表明:智能控制能有效改善系统的控制性能,提高了重复定位精度。更多还原

【Abstract】 In order to improve the positioning accuracy of the ultra-precision positioning system,an intelligent PID control system is presented.The object of study is a micro-positioning stage of the ultra-precision positioning system,which is driven by piezoelectric devices and flexure hinge.Because of the strong nonlinearity of the piezoelectric actuator,such as hysteresis and creep,and the influence of the highly accelerated run of the macro-positioning stage,the traditional PID control can not obtain a good performance.Therefore,a PID position controlling system based on adaptive neural-fuzzy inference is proposed,and the structure of the control system is also studied.The detection result shows that the performance is effectively improved under the intelligent control,and the repetitive positioning accuracy is improved.更多还原