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用QCM研究湿度特性的测试系统及纳米ZnO的制备
Research on Testing System of Humid Property and Preparation of Nano-ZnO Using QCM
【摘要】 为实现实时采集湿度变化的数据,用石英晶体微天平传感器、数据采集卡等构建湿度传感器测试系统。该系统具有灵敏度高、结构简单的优点。利用该系统作为测试平台,以纳米ZnO作为敏感膜,采用热蒸发方法制备纳米ZnO.该方法简单、易操作,制得的纳米ZnO具有四脚状,各方向针脚长度均匀。
【Abstract】 To achieve read-time temperature data collection,this paper presented a test system of temperature sensor,it was made up of quartz crystal microbalance(QCM) sensors and data acquisition card.The system has the advantages of high sensitivity and simple structure.The system was used as a test platform to study the sensitive properties of ZnO was the temperature sensitive membrane.The preparation method of nano-ZnO is utilized by thermal evaporation.The method is simple and easy to operate,and the obtained nano-ZnO has tetrapod-like structure with uniform length on the direction of each pin.
【Key words】 QCM; humidity sensor; test system; nano-ZnO; thermal evaporation;
- 【文献出处】 仪表技术与传感器 ,Instrument Technique and Sensor , 编辑部邮箱 ,2009年04期
- 【分类号】TP274
- 【被引频次】4
- 【下载频次】171