【摘要】 扫描电子显微镜(SEM)是用于观测微观世界的工具。扫描图像系统的聚焦好坏直接影响了观测的结果。反复的人为操作不仅使操作者疲惫,更会带来主观的误差。本系统依靠FEI公司提供的接口函数(API)采集样品的图像,利DCT变换对图像进行频域性质分析,设计出图像清晰度评价函数,并且使用爬山算法搜索出最佳聚焦物镜电流,成功设计出高精度、鲁棒性高的自动调焦软件,实现了调焦的自动化。更多还原

【Abstract】 Scanning Electron Microscope(SEM) is a tool in observing the micro world.The focusing quality of scanning-image system directly influences the result of observation.Repeated operation makes the operator exhausted, thus brings the subjective error.This system,which used API function provided by FEI Company gets the sample images, analyses the frequency-domain characteristics through DCT method and designs an evaluation function to estimate definition of the images.Furthermore,the system can obtain the optimal current of object lens by the Hill Climbing Algorithm.This paper presents a successful design of auto-focus software with high accuracy and robust,which made the focus system automated.更多还原