【摘要】 针对精密工作台微位移和转动测量问题,提出一种基于平面正交光栅图像Radon变换的精密工作台位移测量方法.构建了由平面正交光栅和显微摄像系统组成的测量实验台,在不同实验条件下识别了平面正交光栅的栅线间距和角度,进行了工作台运动测量实验.实验结果证明,Radon变换对噪声不敏感,能很容易地识别出不同条件下平面正交光栅的倾角和位置,可精确地测量工作台位移,测量误差小于1μm.通过对现有系统测量分辨率的分析,提出了取消相机镜头和适配镜、以CCD感光面直接接收放大的光栅图像来进一步提高测量系统分辨率的方案.更多还原

【Abstract】 A measurement method based on the Radon transformation of plane orthogonal-grating image is proposed for measuring the micro-displacement and rotation of a precision worktable.A test table is constructed,which is mainly composed of micro-photography device and plane orthogonal-grating.The grating spaces and angles of the plane orthogonal-grating images are identified under different conditions,and the displacement experiment of the precision worktable is conducted.The experiment results show that Radon transformation is insensitive to measuring noise and the grating position and angles of plane orthogonal-grating image can be easily identified;the displacement of the worktable can be measured accurately,and the measuring error gets within 1 μm.By a analyzing the resolution capacity of the current measuring system,the measuring system configuration for further enhancing precision is proposed,where the camera lens and adapter in micro-photography device become unnecessary,and the amplified grating image is directly received by CCD sensor.更多还原