【摘要】 采用双流体模型,数值研究入射到射频鞘层偏压电极上的离子能量分布.研究结果表明:磁场在改变离子运动状态的同时,调控着基板上的离子能量分布,使之在垂直基板方向和平行基板方向间转移.更多还原

【Abstract】 A two-fluid model is proposed to describe the collisional radio-frequency plasma sheath in a magnetic field,and the ion energy distribution incident on the radio-frequency sheath biased electrode is numerically investigated.The simulation results reveal that the external magnetic field dominates the ion flux and energy distribution of the sheath.The ion energy can be transferred between the perpendicular direction and parallel direction under the action of magnetic field.更多还原