【摘要】 对电子回旋共振(ECR)放电电离过程中的电子与微波互作用特性进行了理论分析与数值模拟.采用粒子模拟(PIC)方法描述带电粒子与微波的互作用,采用蒙特卡罗碰撞(MCC)方法描述粒子间碰撞过程及带电粒子与边界的相互作用.编写了准三维的PIC/MCC数值模拟程序,并对放电过程中电子能量与微波场随时间、空间的演化进行了数值诊断.更多还原

【Abstract】 The theoretical and computational model is presented to study the interaction between electrons and microwave in electron cyclotron resonance discharge.The interaction between charged particles and microwave is described by particle-in-cell method,the collisions and the interaction between charged particles and boundaries of system are described by Monte Carlo collision method.The quasi-three-dimensional simulation code is original.And the spatio-temporal evolvements of electron energy and microwave field in ECR discharge is diagnosed.更多还原