【摘要】 微电子机械系统(MEMS)谐振器周期运动过程中各个时刻的运动特性及其动态特性参数为MEMS器件的设计提供重要参考.提出一种基于相位相关技术的亚像素运动估计算法,可对相关拟合方法进行误差校准补偿,从而提高对物体运动的分辨力,实现纳米精度测量.利用该算法对MEMS器件的运动历程做分析,得到特定驱动频率下MEMS器件的幅度-相位曲线.利用扫频测量原理,获得了MEMS器件的幅频特性.实验结果表明,该方法具有较好的测量精度,测量分辨力优于5.nm.更多还原

【Abstract】 Motion measurement is a key to get characteristics and dynamic parameters of micro-electro-mechanical system(MEMS) resonator in every moment.The results of measurement give important reference to MEMS design.A completely novel calibration subpixel motion measurement algorithm based on phase correlation method was derived,through which not only the error of phase correlation can be calibrated and compensated,but also the resolving power was improved to nano-scale.MEMS motion process was analyzed using the algorithm to get the amplitude-phase curve of MEMS in special driving frequency.The phase-frequency character was also analyzed,and the amplitude-frequency curve was acquired through sweep frequency measurement.Experimental results indicate that the method has a good measurement precision and the resolving power of measurement is less than 5.nm.更多还原