【摘要】 聚焦离子束铣削是一种灵活且高精度的微加工方法,探索通过聚焦离子来铣削进行复杂微纳米结构的加工过程.通过聚焦离子束铣削加工,利用灰度值精确控制离子束加工时间,实现闪耀光栅以及正弦结构等复杂微纳结构的加工过程.同时,利用聚焦离子束对原子力显微镜纳米管探针的长度进行高精度调控,其长度控制精度可以小于50nm.聚焦离子束铣削技术为制备在各种科学工程领域应用的多种复杂微结构提供了有效途径.更多还原

【Abstract】 Focused ion beam(FIB)milling is a flexible method with high precision for microfabrication.Fabrication of complicated micronano structures was studied using FIB milling method in this paper.By controlling the ion beam milling time precisely with grey-scale introduction,micronano blazed grating and sinusoidal structure were fabricated.The FIB mill-ing method,with less than 50 nm shortening accuracy,was also applied to precisely shortening the carbon nanotube(CNT) probe used in atomic force microscope(AFM).The FIB milling technique provides an effective method for fabricating ver-satile micro-structures in various scientific and engineering fields.更多还原