【摘要】 针对原子力显微镜(AFM)纳米成像中存在的失真问题,研究了通过探针建模实现AFM扫描图像重构方法.目前探针盲建模算法在重构AFM图像时存在较大误差,因此提出基于探针模型预估计的AFM扫描图像重构方法.该方法采用分区探针针尖建模,并通过基于该探针模型的反卷积运算实现AFM扫描图像重构,获得比较接近真实形貌的AFM扫描图像.文中介绍了算法的具体步骤,通过仿真和实验结果证明,该方法能够有效降低AFM图像重构时引入的误差,得到的图像更能反映样品表面真实的形貌.更多还原

【Abstract】 Atomic force microscope(AFM) images contain distortions induced by the finite size of the tip.Reconstruction of the images allows one to remove the influence of tip shape and analyze the image at the nano-scale.However there are a lot of errors in the reconstruction of the image using blind tip evaluation,and these errors can be eliminated with the new method proposed in the paper based on pre-estimation of the tip.This method builds the tip model based on the zoning of the probe shape,and reconstructs the image by deconvolution of the tip model in order to obtain close to real surface of the sample.This paper gives steps of the algorithm in detail.The simulation and experimental results show that the errors from reconstructing AFM image are reduced,and the reconstructed image can present more surface information of the sample.更多还原