【摘要】 提出了一种新型的电磁式微机械振动环陀螺结构.为优化陀螺的设计和提高陀螺的性能,在推导微机械陀螺集总参数模型的基础上,建立了电磁式微机械振动环陀螺的数学模型,得到了影响陀螺灵敏度的因素,据此对陀螺参数进行优化设计.采用有限元分析方法和实验测试方法相结合来验证该模型和设计方案的可行性.模型计算结果表明,优化后的陀螺在-200～200(°).s-1的范围内,其机械灵敏度为0.002 3μm/((°).s-1),电学灵敏度为0.062μV/((°).s-1).用有限元模拟得到陀螺机械灵敏度为0.002 9μm/((°).s-1),锁相放大器测试得到微陀螺样机电学灵敏度为0.051μV/((°).s-1).有限元仿真和样机实测结果与理论计算结果基本吻合,证实了该模型的正确性及陀螺设计方案的可行性.更多还原

【Abstract】 A novel electromagnetic micro-machined vibrating ring gyroscope(MVRG) was proposed.In order to optimize its design and improve its performance,the mathematical model for MVRG was established,which was based on the deduction of lumped model for micro-machined gyroscope;moreover,the factors affecting the sensitivity of MVRG were obtained.Based on the above,the parameters of MVRG were optimized.Both finite element analysis(FEA) simulations and experiments were used to validate the mathematical model and the design scheme.Computation results show that the mechanical sensitivity of the gyroscope designed is 0.002 3 μm/((°)·s-1) and electrical sensitivity is 0.062 μV/((°)·s-1) over a range of-200—200(°)·s-1.The FEA simulation shows that the mechanical sensitivity is 0.002 9 μm/((°)·s-1) and test results through phase locked amplifier show that the electrical sensitivity is 0.051 μV/((°)·s-1).The results of FEA simulation and experiments agree with the theoretical values,which proves that the mathematic model is correct and the design scheme of the gyroscope is feasible.更多还原