【摘要】 根据微机电系统(MEMS)加工工艺特点和初始位置定位机构的设计要求,设计了两种MEMS初始位置定位机构的结构方案.通过力学分析,求出了定位机构解除定位所需要克服的阻力计算公式,用ANSYS仿真验证了其正确性.根据满足系统性能要求和利于装配两者均衡的原则,对两种定位机构的设计方案进行了对比研究,选择能减少阻力的MEMS初始位置定位机构.采用MEMS工艺中的LIGA工艺加工出初始位置定位机构.用VDS92-1430离心实验机分别加速到3 000 r/min、5 000 r/min、8 000 r/min和12 000 r/min进行离心实验.实验结果表明,设计的MEMS初始位置定位机构能正常工作,性能达到了设计要求.更多还原

【Abstract】 According to the characteristic of micro electro mechanical systems(MEMS) fabrication technology and the design requirements for the initial position latch mechanism,two MEMS initial position latch mechanisms were designed.By mechanical analysis,the calculation formular of resistance that the initial position latch mechanism needed to overcome was determined,which was validated by ANSYS simu￣lation.According to the balance principle between satisfaction of the system requirements and feasibility of assembly,the two MEMS initial position latch mechanisms were compared and the resistance reduction MEMS initial position latch mechanism was chosen.The MEMS initial position latch mechanism was fabricated with LIGA technology which was one of the MEMS fabrication technology.The centrifugal tests were carried by VDS92-1430 centrifugal tester which was accelerated to 3 000,5 000,8 000 and 12 000 r/min respectively.The test result shows that the designed MEMS initial position latch mechanism can work properly and meets the design requirement.更多还原