【摘要】 结合实验情况对通过基底材料的电流密度、原料中杂质行为、高价卤化物的生成以及卤化物的蒸汽压等影响钛沉积速率的主要因素进行了系统分析。以自制的卤化剂和粗钛为原料,采用特殊的工艺设备,首先使粗钛与卤化剂反应制得钛卤盐,然后控制反应条件,使该钛卤盐在适宜条件下发生热裂解制备高纯钛。结果发现:控制适宜的电流密度和操作温度,可使钛卤盐保持较高的蒸汽压与转移速度,并且可以抑制杂质碘化物的转移分解,从而使得纯钛有较为满意的沉积速率和纯度。更多还原

【Abstract】 The key effecting factors on deposition rate of titanium were analyzed and concluded.A special process was adopted,halogen and raw titanium was used as raw materials.First,titanium iodides was provided with raw titanium and halogen.Then the high purity titanium was deposited when the titanium iodides was decomposed under right conditions.The main influencing factors on deposition rate of titanium were the current density,the impurity of the raw titanium,the high valent titanium iodides and the vapor pressure of the titanium iodides.更多还原