【摘要】 采用非平衡磁控溅射法制备MoS2-Ti复合薄膜,采用SEM、XRD和XRF对薄膜的结构进行表征,在真空球-盘摩擦试验机上评价试验载荷、转速以及基底材料种类对薄膜真空摩擦磨损性能的影响.结果表明:MoS2-Ti复合薄膜表面致密均匀,断面为细柱状结构,呈MoS2(002)基面择优取向,薄膜中Ti含量为8 wt.%,S∶Mo原子比为1.8.在真空度优于5×10-3Pa、室温环境中,当试验载荷从5 N增加至20 N时,薄膜的摩擦系数和耐磨寿命都呈减小趋势,摩擦系数变化符合赫兹接触理论模型;当试验速度从250 r/min提高至1 000 r/min时,薄膜的摩擦系数逐渐减小,耐磨寿命变化量较小;不同基体材料上薄膜的摩擦系数平均值均为0.02,9Cr18、45#钢和40Cr基材上薄膜耐磨寿命区别不大,在20~25 km之间,磨损形式为磨粒磨损,30CrMnSi上薄膜耐磨寿命明显下降,只有10.3 km,磨损形式为黏着磨损,研究结果表明如果基底材料与摩擦对偶间发生黏着磨损,会明显降低其表面沉积薄膜的耐磨寿命.更多还原

【Abstract】 MoS2-Ti composite coatings are deposited by unbalanced magnetron sputtering system.The structure of the coatings has been studied by using SEM,XRD and XRF.The tribological behavior of the coatings changed with load,sliding speed and substrate materials is studied by using ball-on-disc tester in vacuum simulator.The results show that MoS2-Ti composite coatings are dense and uniform,with the cross-section of which has close columnar structure.XRD analysis reveals that the MoS2-Ti composite coatings are strong basal(002) planes crystal orientation.The Ti content in the coating is 8 wt.% and the atomic ratio of S to Mo is 1.8.The tribological properties of the coatings are tested in vacuum environment where the pressure is under 5×10-3 Pa and normal temperature.The results show that when test load increases from 5 to 20 N,the friction coefficient and wear life of the coatings all decrease.When sliding speed increases from 250 to 1 000 r/min,the friction coefficient of the coatings decrease but the wear life of them are almost the same.When deposited on different substrate materials,the friction coefficient of the coatings are consistent and the value is as low as 0.02.The wear life of the coatings deposited on 9Cr18、45# steel and 40Cr are similar and between 20～25 km.The wear mechanism of them appears to be particle wear.The wear life of 30CrMnSi sample is only 10.3 km,half of the others.The wear mechanism of it appears to be adhesive wear.更多还原