【摘要】 为实现对悬浮转子微陀螺转子五自由度的测量,提出了一种频分复用的微位移检测原理,主要介绍了多频率信号发生器,前置放大器,锁相放大器组成的测试系统,设计了一种基于DDS技术的多频率信号发生器和基于锁相放大原理的解调电路。实验和分析结果表明,该电路能实现多自由度微位移检测,设计的多频率信号发生器的频率分辨率能达到0.005821Hz,相位分辨率可以达到0.006rad,检测轴向灵敏度为1.34V/μm,检测径向灵敏度为0.092V/μm,测量电路的轴向位移分辨率为0.45nm,径向位移分辨率为6.6nm,转角的分辨率为0.25μrad,位移检测电路的分辨率,灵敏度和测量范围能够满足静电悬浮转子微陀螺的控制需要。更多还原

【Abstract】 In order to realize the measurement of the five-degree-of-freedom of the rotor for a kind of micomachined electrostatically suspended gyroscope, a micro-displacement detection principle is raised. The detection system mainly includes the multi-frequency signal generator, front amplifier and lock-in amplifier. A multi-frequency signal generator is designed based on the DDS technology and a demodulation circuit based on the lock-in amplifier theory. The experiment and analysis results indicate that the circuit could realize multi-freedom measurement of the rotor. The multi-frequency signal generator’s frequency resolution can reach 0.005821Hz and the phase resolution can reach 0.006rad.The axial direction detection sensitivity is 1.34V/?m and the radial direction detection sensitivity is 0.092V/?m.The axial detection resolution of the circuit is 0.45nm, the radial detection resolution is 6.6 nm and the rotate angle’s resolution is 0.25?rad. The resolution, sensitivity and linear detecting range can satisfy the requirements of the control system.更多还原