【摘要】 基于柔性铰链变形原理设计了一种压电驱动的两自由度柔顺机构微动精密定位平台。首先建立了平台的刚度、固有频率和强度的分析模型,通过优化设计得出了平台的最优结构尺寸。利用有限元软件仿真分析验证了设计模型和优化结果的正确性。最后制造了原型样机,进行了实验,对平台进行了标定并分析了平台的定位误差。更多还原

【Abstract】 Based on the deformation principle of flexure hinge,a two degree of freedom micro-positioning stage actuated by PZT is designed. First,a theoretical analysis model of this stage is established. Second,the optimal structure parameters are obtained by the optimization method. Further,the design results are validated by the simulation of Finite Element Analysis software. Finally,prototype of stage is manufactured. Calibration of stage is performed,and error of positioning is analyzed based on the experimental results.更多还原