【摘要】 采用蒙特卡罗模拟,对氮等离子体枪的两个环形电极间的氮气辉光放电过程中电子的输运过程进行研究.计算在不同平均电场与粒子数密度的比值(E/N)下,电子与氮分子发生不同碰撞的概率、出射电子的平均能量、方向角分布和电子的能量分布.结果表明,电子能量近似服从玻尔兹曼分布.随着E/N的升高,电子平均能量升高,发生激发、离化、电离和离化电离碰撞的概率增大;非均匀分布的电场使分子获得更高的离化率,同时显著增强出射电子的能量.模拟结果为等离子体应用设计提供了参考依据.更多还原

【Abstract】 Monte Carlo simulation on electron transport in nitrogen glow discharge between drilled electrodes in a plasma ion source is presented.Collision probabilities of electron-molecule,average energy and exit angle of outgoing electrons are calculated.Energy distribution of electron calculated follows approximately Boltzmann distribution.With increasment ofE/N,electron average energy and probabilities of electric excitation,dissociation,ionization,dissociative ionization collisions are increased.Nonuniform electric field between electrodes enhances ionization rate and electron average energy obviously.更多还原