【摘要】 晶圆制造的加工工艺日趋复杂,存在严格的逗留时间约束,无法解决自动化组合设备的调度问题,尤其对于重入加工、作业时间的随机波动及多自动化组合设备等复杂的加工过程更是如此。通过分析晶圆制造自动化组合设备调度的难点和局限性以及现有的调度方法及其局限性,提出了"仿真+启发式+优化"的方法,可能是有效解决组合设备调度问题的途径。更多还原

【Abstract】 With strict residency time constraint,processes of wafer fabrication in cluster tools has become increasingly complicated.It was difficult to schedule automated cluster tools,especially multi cluster tools with complex processes such as re-enter processes and stochastic variation of working time.By analyzing difficulty and limitations of the existing scheduling methods for cluster tools in semiconductor fabrication,"simulation+heuristic+optimization" strategy was proposed which would be an effective solution to cluster tool scheduling problems.更多还原