【摘要】 在具有新型谐振腔的微波等离子体CVD装置上,利用乙醇和氢气为工作气体在石英玻璃管外表面沉积了均匀、致密的纳米金刚石薄膜。采用扫描电子显微镜、Raman光谱及X射线衍射表征了金刚石薄膜的质量;设计腐蚀实验检验了金刚石薄膜的抗腐蚀效果。结果表明:在反应气压为5.5 kPa、碳源浓度为8vol%、石英玻璃管温度为500℃的条件下,得到的纳米金刚石薄膜能有效增强石英玻璃管的抗腐蚀性能。更多还原

【Abstract】 Uniform and compact nanocrystalline diamond thin films were deposited on quartz tube substrate with the gas mixture of ethanol and hydrogen by microwave plasma CVD equipment which has a novel type of resonance cavity.The quality of diamond thin films were tested by SEM,Raman spectroscopy and XRD.A corrosion experiment was designed to test the anti-corrosion effect of diamond thin films.The results showed that when the reaction pressure is 5.5 kPa,the ethanol concentration is 8 vo1%,the reaction temperature is 500 ℃,the nanocrystalline diamond thin film could be obtained,which is able to enhance the anti-corrosion performance of quartz tube.更多还原