【摘要】 微纳结构雕塑薄膜是在低温环境下采用倾斜角沉积技术再辅以基片的运动而制备得的各向异性功能性薄膜。由于沉积过程中的自阴影效应使得雕塑薄膜中存在很多孔洞,而且微观结构复杂多样,从而表现出很多新颖的光学特性,因此可作为微纳光电子器件实现工业应用。更多还原

【Abstract】 Micro/nano-structural sculptured thin films (STFs) are anisotropic functional films by means of glancing angle deposition (GLAD) with the rotation of substrate. The self-shadowing effect during deposition makes a lot of voids and complicated microscopic structures in STFs,thus STFs have many special optical properties that can be used as micro/nano-optoelectronic devices and STFs fabricated on substrate with periodical prestructures satisfy the preparation qualities for three-dimensional photonic crystals.更多还原