【摘要】 设计了纳米级双面抛光机的控制系统,对其实现方法进行了研究,分析了控制系统的组成,提出并建立了基于微机统一控制系统的解决方案。采用WindowsCE软件平台,图形化界面功能指示、高可靠性的实时操作系统、高精度光栅传感器、压力传感器、数字阀组成电气联合控制系统,应用新型电气直接数字控制技术实现该机的自动加工。更多还原

【Abstract】 The control system of the ultra-precision two-sided polishing machine at nanometer level was designed,its realization method was studied,its structure was analyzed and the solution based on the microcomputer common control system was proposed.Electricity control system was built by using Windows CE software platform,graphic interface function indicator,realtime operating system of high reliability,high accuracy grating sensor,pressure transmitter,digital valve.The automatic processing of the machine was realized by the new electricity direct digital control technology.更多还原