【摘要】 利用气相色谱法,分析六氟化钨中微量气体杂质的含量。由于六氟化钨有很强的腐蚀性,在对其进行分析时,要对气相色谱仪进行改造。本文设计了一个反吹双通路分析系统,在六氟化钨中的气相杂质进入检测器后,可以及时将六氟化钨反吹出去,从而既可保证分析的准确性,又可避免六氟化钨对仪器的腐蚀。此外,本实验还结合仪器以及被测样品本身的性质,通过正交实验确定了气相色谱仪的最佳操作参数。在此基础上,利用一系列标准气体,确定了采用不同的色谱柱进行分析时,仪器最佳的反吹时间,从而保证分析的准确性和安全性。最终可以准确地对六氟化钨中的四氟化碳、二氧化碳、六氟化硫、氧气、氮气和一氧化碳等痕量的气体杂质进行分析,确定了对六氟化钨中气体杂质的分析方法。更多还原

【Abstract】 The paper shows a technique which can analyze the gaseous in tungsten hexafluoride(WF6)by gas chromatography.Because WF6 has strong causticity,experiment rebuilds the gas chromatography according as the especial characters of WF6.The paper designs a dual-channel analytical system,which can blow WF6 out the gas chromatography in time when the gaseous into the detector,so on one hand we can assure the analytic veracity,on the other hand,we can avoid the detector’s cauterization.The experimentation confirms the best work parameter of gas chromatography by thegonal experiment which based on the apparatus and sample gas.Moreover,we make sure the best backflush time bases different chromatography’s poles by a series of standard gases,so we can guarantee the analytical preciseness and security.At last,we can analyze the CF4,CO2,SF6,O2,N2,CO in WF6 accurately.So we ascertain a method which can analyze the gaseous in WF6.更多还原