节点文献
金刚石膜的微结构研究
Studies of Miamond Film Fine Structure
【摘要】 金刚石特殊的晶体结构决定其在很多方面具有优异的性质,金刚石膜的截面特性在一定程度上反映了整个沉积过程中金刚石膜生长的一些规律。文章通过研究金刚石膜截面特点来分析金刚石膜生长的规律,进而总结出制备高品质金刚石膜的方法。
【Abstract】 The peculiar crystal structure of miamond decides the person having the outstanding character in many aspects.Miamond film cross section characteristic property has reported some law of entire deposition process middle miamond film growth to a certain extent.The law the main body of a book is passed mainly studying miamond analyses the miamond film coming film cross section characteristic growing,sums up out high-quality preparation miamond film method then.
【基金】 吉林省科技厅项目(20070314)
- 【文献出处】 廊坊师范学院学报(自然科学版) ,Journal of Langfang Teachers College(Natural Science Edition) , 编辑部邮箱 ,2009年06期
- 【分类号】O484.1
- 【下载频次】77