【摘要】 介绍了长波红外2048元线列碲镉汞焦平面器件的制备技术和达到的性能参数.探测器采用离子注入平面pn结制备光敏元,通过间接倒焊技术和读出电路互联,采用8个256元焦平面模块拼接2048元线列焦平面器件.光敏元的响应截止波长达到9.9μm,相应的R0A达到10Ωcm2,平均峰值探测率达到9.3×1010cmHz1/2W-1,响应不均匀性为8%,有效光敏元率大于99.5%.更多还原

【Abstract】 The technology and performance of long-wave 2048-elements linear HgCdTe focal plane array were reported.The n-on-p photodiodes were fabricated by planar ion implantation and hybridized with readout circuit by indirect flip chip technique.The 2048-elements linear array consists of 8 segments of 256-element linear arrays that are "butted" on a single substrate in a staggered format.The cut off wavelength and R0A of the photodiode are 9.9μm and 10Ωcm2,respectively.The average detectivity of the 2048-elements linear array is 9.3×1010 cmHz1/2W-1.The ununiformity of response is 8%.The array peak operability is larger than 99.5%.更多还原