【摘要】 针对高电荷态离子与表面作用产生的溅射离子能谱测量,研制了一台127°径向位置灵敏柱形静电离子能谱仪。利用能量为800keV的Ar8+离子轰击金属铍靶产生的溅射离子测试了本谱仪。测试结果表明,该谱仪克服了传统静电谱仪通过扫描工作电压单能量点取谱的缺点,实现分段取谱——在单个工作电压下可同时获取一段0.85E≤E≤1.15E范围的能谱,从而提高测量效率。更多还原

【Abstract】 A 127° electrostatic coaxial cylindrical energy spectrometer with a radial position sensitive MCP detector is designed for sputtering ions measurement.It has been tested by measuring the energy spectrum of the sputtering ions in the collision of 800 keV Ar8+ bombarding beryllium target.A segment of the energy spectrum(0.85Ec≤E≤1.15Ec)can be obtained at one working voltage(U),which is much efficient than the traditional point-to-point voltage scanning method.更多还原