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氧化钨/氧化钛溶胶凝胶薄膜的气体感测性质研究

Tungsten Oxide/Titanium Oxide Sol-Gel Film for Gas Sensing Applications

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【作者】 郑锦华蔡健益陈锦毅林弘斌苏程裕林鸿明林中魁

【Author】 CHENG Ching-Hua1,TSAY Chien-Yie1,CHEN Chin-Yi 1,LIN Hung-Bin1,SU Cherng-Yuh2,LIN Hong-Ming3,LIN Chung-Kwei1(1.Department of Materials Science and Engineering,Feng Chia University,Taichung 407,Taiwan,China;2.Institute of Manufacturing Technology,National Taipei University of Technology,Taipei 106,Taiwan,China;3.Department of Materials Engineering,Tatung University,Taipei 104,Taiwan,China)

【机构】 逢甲大学材料科学与工程学系台北科技大学机械系大同大学材料工程学系

【摘要】 在氧化钨溶凝胶中,添加10%的二氧化钛溶凝胶,煅烧后可得形成氧化钨/氧化钛复合粉体.所得粉体,以XRD、SEM、FT-IR、光学特性分析等仪器进行粉体的基本性质与结构检测.随后将氧化钨/氧化钛复合粉末包覆于气体感测电极上,进行气体感测的各种相关检测与分析.结果显示,添加10.0%氧化钛的氧化钨/氧化钛,由100℃的ε-WO3单斜晶结构,随着热处理温度达到300℃,缓慢转变成三斜晶的δ-WO3.比较不同参数的粉体,添加10.0%氧化钛的氧化钨/氧化钛具有较优异感测性质;在200℃,3×10-6的NO2下,灵敏度为29.9.而在150℃,相同浓度下,有最佳灵敏度为86.1.

【Abstract】 Tungsten oxide powders and films were prepared by sol-gel process.During the process,10%(ω) titanium oxide was added to prepare the hybrid tungsten/titanium material.After calcining at 300℃,the hybrid material was examined by X-ray diffraction and scanning electron microscope.In addition,gas sensing properties of hybrid materials were investigated.Experimental results showed that the structure of the tungsten oxide/titanium oxide(10% addition) exhibited monoclinic WO3 phase at 100℃ and gradually transformed into triclinic WO3 phase after heating at 300℃.The sensors prepared by tungsten oxide/titanium oxide(10% addition) powder also exhibited the best gas sensing performance.Under an environment of 3×10-6 NO2 gas,the sensitivity was 29.9 and 86.1 when tested at 200 and 150℃,respectively.

【基金】 基金资助项目(编号:NSC93-2216-E-035-026)
  • 【文献出处】 过程工程学报 ,The Chinese Journal of Process Engineering , 编辑部邮箱 ,2009年S2期
  • 【分类号】O646
  • 【下载频次】215
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