【摘要】 为了提高Glan-Taylor棱镜的透射率,研究了Glan-Taylor棱镜在可见光波段及1064nm波长处减反射膜膜的设计和制备.为提高薄膜和冰洲石晶体的附着力,采用沉积Al2O3为过渡层,ZrO2作缓冲层的方法,用单纯形优化的方法进行膜系优化设计.用电子束沉积和离子束辅助沉积的方法制备了多层减反射膜,并采用石英晶体振荡法监控膜厚和沉积速率.测量结果表明,在可见光波段及1064nm波长处的剩余反射率均小于0.5%经测试薄膜与冰洲石晶体的附着力性能良好.更多还原

【Abstract】 In order to improve increase the transmissivity of the Glan-Taylor prism,antireflection films for the visible spectrum and 1 064 nm were designed and evaporated on the Glan-Taylor prism.Al2O3 and ZrO2 were selected as the transition layer and the buffer layer to improve the adhesion between the coating and the Iceland crystal.The simplex refinement method was used to optimize coatings.A multilayer antireflection coating was deposited using electron beam evaporation and ion assisted deposition.While coating thickness and deposition rate were monitored and demonstrated by quartz crystal oscillation.The testing results indicate that:the value of the average residual reflection is below 0.5% in visible spectrum and 1 064 nm,and the adhesive power between the coating and the Iceland crystal is good.更多还原