【摘要】 基于PZT压电陶瓷驱动器的非球面能动抛光盘,能够在PZT驱动器的作用下改变面形,用于中小口径非球面镜加工。为优化设计基于PZT压电陶瓷驱动器的非球面能动抛光盘,利用有限元分析方法,计算各驱动器的影响函数,计算非球面能动抛光盘的输出面形,与理论面形比较得到剩余残差。以优化设计驱动器排布方式和极头直径为例,当非球面能动抛光盘中心到非球面工件中心的距离L为120mm,分别计算比较,极头直径为Φ10mm时,19单元PZT圆形排布与21单元PZT方形排布的剩余残差;以及19单元PZT圆形排布时,极头直径为Φ10mm与Φ14mm的剩余残差。结果表明,非球面能动抛光盘产生变形后的剩余残差RMS相应分别为0.303μm、0.367μm、0.328μm。因此,基于PZT压电陶瓷驱动器的非球面能动抛光盘确定选用19单元PZT圆形排布且极头直径Φ10mm。更多还原

【Abstract】 The deformable aspheric polishing lap based on PZT actuator can change the lap surface continuously to fit the surface of middle aperture aspheric optical mirrors at any location.In order to optimize design parameters of PZT actuated deformable aspheric polishing lap,the influence function of each PZT actuator and the exported surfaces of deformable aspheric polishing lap are calculated by finite element method.Compared with the needed mirror surface,the residual surface errors are gotten.For example,when the distance from deformable polishing lap to the hyperboloid mirror center L is 120mm,according to different diameters of heads and different arrangements of PZT actuators,the surface error RMS is 0.303μm,0.367μm,0.328μm respectively.The results show that the circle arrangement and diameter Φ10mm should be selected.更多还原