【摘要】 光学镜面表面变形包含刚体位移和表面畸变,其中表面畸变是影响成像质量的主要因素,因此需去除刚体位移,分析表面畸变。通过坐标变换生成一个新的理论镜面,用该镜面拟合变形镜面,用拟合镜面与变形镜面轴向差值计算出表面畸变的RMS值及PV值。实例计算表明该算法拟合精度较高,适用于抛物面、球面镜在支撑和装夹下的镜面面形精度分析。更多还原

【Abstract】 The distortion of optical mirror surface includes rigid-body motion and aberration.The aberration is main factor which affects image quality.A new theory mirror surface is built by coordinate transformation.Deformation mirror surface is fit by theory mirror surface.The RMS value and PV value of aberration are calculated using axial direction difference which comes from fitting and deformation mirror surface.The numerical result shows that the algorithms has high accuracy and can be well used in paraboloid and sphere mirror surface figure accuracy analyse when mirror in support and clamping condition.更多还原