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利用退火方法降低自旋阀薄膜的矫顽力(英文)

Reduction of hysteresis for spin valve film by annealing method

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【作者】 李伟刘华瑞任天令刘理天

【Author】 LI Wei1,2,LIU Hua-rui3,REN Tian-ling3,LIU Li-tian3 (1.Key Laboratory of Optoelectronic Technology and Systems of the Ministry of Education,Chongqing University, Chongqing 400044,China;2.Microsystem Research Center,Chongqing University, Chongqing 400044,China;3.Institute of Microelectronics,Tsinghua University, Beijing 100080,China)

【机构】 重庆大学光电技术与系统教育部重点实验室重庆大学微系统研究中心清华大学微电子学研究所

【摘要】 降低自旋阀薄膜矫顽力对于制作巨磁电阻(GMR)传感器非常重要。报告了利用退火方法降低自旋阀薄膜矫顽力的实验结果,介绍了数值模拟退火的条件和方法,借助计算机对退火实验的条件及其实验结果进行了模拟。结果表明,模拟后的结果可以用来进一步优化退火条件,并不再需要做大量退火实验。使用优化后的退火条件大大降低了自旋阀薄膜的矫顽力同时可保持自旋阀的磁电阻变化率(MR)在较高的水平。介绍了不同退火参数下的模拟实验,结果显示退火前样品的的矫顽力为358.2 A/ m、MR为9.24%,退火后其分别降到3.18 A/ m和8.54%,表明数值模拟方法可以较好地拟合自旋阀薄膜的退火条件及实验结果,并有助于优化退火条件。

【Abstract】 To reduce the hysteresis of spin valve films is important for fabricating Giant Magnetoresistance(GMR) sensors. This paper reports the experiment results of reducing hysteresis of the spin valve films by using an annealing method and describes numerically simulating annealing conditions and methods. By utilizing the method of numerical simulating,the annealing conditions and experiment results are simulated. The simulating results show that the numerical simulating can not only optimize annealing conditions,but also decrease a large numbers annealing experiments. Using optimized annealing conditions,the coercive force of the spin-valve film is reduced enormously but the Magnetoresistance(MR) of the spin-valve film can be kept a higher level. An annealing experiment and different annealing parameters show that the coercive force and MR of the spin-valve film respectively is 358.2 A/m and 9.24% before annealing,but they have increased to 3.18 A/m and 8.54% after annealings,which proves the numerical simulating method is conductive to the improvement of the annealing conditions.

【关键词】 自旋阀薄膜退火数值模拟
【Key words】 spin-valve filmannealingnumerical simulation
【基金】 Supported by the National Natural Science Foundation of China( Grant No .90407013)
  • 【文献出处】 光学精密工程 ,Optics and Precision Engineering , 编辑部邮箱 ,2009年06期
  • 【分类号】TP212
  • 【下载频次】73
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