【摘要】 利用实验室自行设计了直接耦合式微波等离子体化学气相沉积(Chemical Vapor Deposition,CVD)金刚石膜装置,并在石英管反应腔加上磁镜场来更好的约束等离子体,使等离子体球成为"碟盘"状,使沉积面积大、性能稳定、减少在石英管壁和观察窗的沉积,从而有效的提高电离的活性基团利用率,沉积出高质量的(类)金刚石膜.更多还原

【Abstract】 We design new experiment device,direct Coupled of Microwave Plasma CVD diamond-films Device.We use magnetic mirror in quartz tube reaction chamber lens to better constraint plasma.Plasma becomes to "dish plate" sedimentary area,stable performance,that reduces attachments on quartz tube and observing window,effectively using of sedimentary facies of active functional deposit high quality and large area diamond film.更多还原